دورية أكاديمية
Sheet resistance measurement of non-standard cleanroom materials using suspended Greek cross test structures
| العنوان: | Sheet resistance measurement of non-standard cleanroom materials using suspended Greek cross test structures |
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| المؤلفون: | Enderling, S., Brown, C.L., III, Smith, S., Dicks, M.H., Stevenson, J.T.M., Mitkova, M., Kozicki, M.N., Walton, A.J. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 19(1):2-9 Feb, 2006 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2005.863248 |