Capacitive micromachined ultrasonic transducer (cMUT) made by a novel "reverse fabrication process"

التفاصيل البيبلوغرافية
العنوان: Capacitive micromachined ultrasonic transducer (cMUT) made by a novel "reverse fabrication process"
المؤلفون: Caliano, G., Caronti, A., Savoia, A., Longo, C., Pappalardo, M., Cianci, E., Foglietti, V.
المصدر: IEEE Ultrasonics Symposium, 2005. Ultrasonics Symposium, 2005 IEEE. 1:479-482 2005
Relation: IEEE Ultrasonics Symposium, 2005.
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780393821
9780780393820
تدمد:10510117
DOI:10.1109/ULTSYM.2005.1602895