High performance tantalum carbide metal gate stacks for nMOSFET application

التفاصيل البيبلوغرافية
العنوان: High performance tantalum carbide metal gate stacks for nMOSFET application
المؤلفون: Hou, Y.T., Yen, F.Y., Hsu, P.F., Chang, V.S., Lim, P.S., Hung, C.L., Yao, L.G., Jiang, J.C., Lin, H.J., Jin, Y., Jang, S.M., Tao, H.J., Chen, S.C., Liang, M.S.
المصدر: IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. International Electron Devices Meeting 2005 Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International. :31-34 2005
Relation: International Electron Devices Meeting 2005
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:078039268X
9780780392687
تدمد:01631918
2156017X
DOI:10.1109/IEDM.2005.1609258