Resistance instability in Cu-damascene structures during the isothermal electromigration test

التفاصيل البيبلوغرافية
العنوان: Resistance instability in Cu-damascene structures during the isothermal electromigration test
المؤلفون: Impronta, M., Farris, S., Ficola, A., Scorzoni, A.
المصدر: 2005 IEEE International Integrated Reliability Workshop Integrated Reliability Workshop Integrated Reliability Workshop Final Report, 2005 IEEE International. :4 pp. 2005
Relation: 2005 IEEE International Integrated Reliability Workshop Final Report
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780389921
9780780389922
تدمد:19308841
23748036
DOI:10.1109/IRWS.2005.1609584