Temperature Dependence of Quality Factor in MEMS Resonators

التفاصيل البيبلوغرافية
العنوان: Temperature Dependence of Quality Factor in MEMS Resonators
المؤلفون: Kim, B., Jha, C.M., White, T., Candler, R.N., Hopcroft, M., Agarwal, M., Park, K.K., Melamud, R., Chandorkar, S., Kenny, T.W.
المصدر: 19th IEEE International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. :590-593 2006
Relation: 19th IEEE International Conference on Micro Electro Mechanical Systems
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780394755
9780780394759
تدمد:10846999
DOI:10.1109/MEMSYS.2006.1627868