مؤتمر
Wafer-Level Transfer of Thermo-Piezoelectric Si3N4Cantilever Array on a CMOS Circuit for High Density Probe-Based Data Storage
| العنوان: | Wafer-Level Transfer of Thermo-Piezoelectric Si3N4Cantilever Array on a CMOS Circuit for High Density Probe-Based Data Storage |
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| المؤلفون: | Young-Sik Kim, Hyo-Jin Nam, SeongSoo Jang, Caroline Sunyong Lee, Won-Hyeog Jin, Il-Joo Cho, Jong-Uk Bu, Sun-Il Chang, Euisik Yoon |
| المصدر: | 19th IEEE International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. :922-925 2006 |
| Relation: | 19th IEEE International Conference on Micro Electro Mechanical Systems |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780394755 9780780394759 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2006.1627951 |