مؤتمر
InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
| العنوان: | InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides |
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| المؤلفون: | Liu, B., Landesman, J.-P., Leclercq, J.-L., Rhallabi, A., Avella, M., Gonzalez, M.A., Jimenez, J., Guilet, S., Cardinaud, C., Pommereau, F. |
| المصدر: | 2006 International Conference on Indium Phosphide and Related Materials Conference Proceedings Indium Phosphide and Related Materials Indium Phosphide and Related Materials Conference Proceedings, 2006 International Conference on. :278-281 2006 |
| Relation: | 2006 International Conference on Indium Phosphide and Related Materials Conference Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780395581 9780780395589 |
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| تدمد: | 10928669 |
| DOI: | 10.1109/ICIPRM.2006.1634168 |