دورية أكاديمية
Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer
| العنوان: | Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer |
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| المؤلفون: | Puente, D., Arana, S., Gracia, J., Ayerdi, I. |
| المصدر: | IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 6(3):548-556 Jun, 2006 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 1530437X 15581748 23799153 |
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| DOI: | 10.1109/JSEN.2006.874030 |