مؤتمر
High and Hyper NA Immersion Lithography using Advanced Patterning Film APF TM
العنوان: | High and Hyper NA Immersion Lithography using Advanced Patterning Film APF TM |
---|---|
المؤلفون: | van der Reijden, M.J., Op de Beeck, M., Sleeckx, E., Jaenen, P., Kunnen, E., Degroote, B., Wendy Yeh, Schreutelkamp, R. |
المصدر: | The 17th Annual SEMI/IEEE ASMC 2006 Conference Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE. :39-43 2006 |
Relation: | The 17th Annual SEMI/IEEE ASMC 2006 Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 1424402549 9781424402540 |
---|---|
تدمد: | 10788743 23766697 |
DOI: | 10.1109/ASMC.2006.1638721 |