مؤتمر
Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing
العنوان: | Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing |
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المؤلفون: | Morrison, J.R., Bortnick, B., Martin, D.P. |
المصدر: | The 17th Annual SEMI/IEEE ASMC 2006 Conference Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE. :44-49 2006 |
Relation: | The 17th Annual SEMI/IEEE ASMC 2006 Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 1424402549 9781424402540 |
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تدمد: | 10788743 23766697 |
DOI: | 10.1109/ASMC.2006.1638722 |