Unique Ultra Shallow Junction Scheme with Conventional Activation Process

التفاصيل البيبلوغرافية
العنوان: Unique Ultra Shallow Junction Scheme with Conventional Activation Process
المؤلفون: Tsai, C.H., Lan, B.C., Lin, Y.H., Chiang, W.T., Chang, T.Y., Liu, P.W., Pan, J.W., Liu, Y.C., Tsai, J.L., Chen, T.F., Tsai, C.T.
المصدر: 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. VLSI Technology, 2006. Digest of Technical Papers. 2006 Symposium on. :188-189 2006
Relation: 2006 Symposium on VLSI Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:1424400058
9781424400058
تدمد:07431562
21589682
DOI:10.1109/VLSIT.2006.1705280