Linear and rotational magnetic micromotors fabricated using silicon technology

التفاصيل البيبلوغرافية
العنوان: Linear and rotational magnetic micromotors fabricated using silicon technology
المؤلفون: Wagner, B., Kreutzer, M., Benecke, W.
المصدر: [1992] Proceedings IEEE Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE. :183-189 1992
Relation: 1992 Proceedings IEEE Micro Electro Mechanical Systems
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780304977
9780780304970
DOI:10.1109/MEMSYS.1992.187715