دورية أكاديمية
Observation of dust particle growth and fallout in RF-excited silane discharges
| العنوان: | Observation of dust particle growth and fallout in RF-excited silane discharges |
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| المؤلفون: | Bohme, W., Kohler, W.E., Romheld, M., Veprek, S., Seebock, R.J. |
| المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 22(2):110-115 Apr, 1994 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00933813 19399375 |
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| DOI: | 10.1109/27.279012 |