3-D topography simulation of via holes using generalized solid modeling

التفاصيل البيبلوغرافية
العنوان: 3-D topography simulation of via holes using generalized solid modeling
المؤلفون: Tazawa, S., Leon, F.A., Anderson, G.D., Abe, T., Saito, K., Yoshii, A., Scharfetter, D.L.
المصدر: 1992 International Technical Digest on Electron Devices Meeting Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International. :173-176 1992
Relation: Proceedings of IEEE International Electron Devices Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780308174
9780780308176
تدمد:01631918
DOI:10.1109/IEDM.1992.307335