دورية أكاديمية
Fabrication of submicron junctions-proximity rapid thermal diffusion of phosphorus, boron, and arsenic
| العنوان: | Fabrication of submicron junctions-proximity rapid thermal diffusion of phosphorus, boron, and arsenic |
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| المؤلفون: | Zagozdzon-Wosik, W., Grabiec, P.B., Lux, G. |
| المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 41(12):2281-2290 Dec, 1994 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00189383 15579646 |
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| DOI: | 10.1109/16.337440 |