دورية أكاديمية
Application of selective epitaxial silicon and chemo-mechanical polishing to bipolar transistors
| العنوان: | Application of selective epitaxial silicon and chemo-mechanical polishing to bipolar transistors |
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| المؤلفون: | Nguyen, C.T., Kuehne, S.C., Wong, S.S., Garling, L.K., Drowley, C. |
| المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 41(12):2343-2350 Dec, 1994 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00189383 15579646 |
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| DOI: | 10.1109/16.337447 |