مؤتمر
Microelectronics manufacturing science and technology (MMST): single-wafer RTP-based 0.35 /spl mu/m CMOS IC fabrication
| العنوان: | Microelectronics manufacturing science and technology (MMST): single-wafer RTP-based 0.35 /spl mu/m CMOS IC fabrication |
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| المؤلفون: | Moslehi, M., Velo, L., Paranjpe, A., Chapman, R., Kuehne, J., Yong Jin Lee, Huang, S., Schaper, C., Breedijk, T., Yin, D., Anderson, D., Davis, C. |
| المصدر: | Proceedings of IEEE International Electron Devices Meeting Electron devices Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International. :649-652 1993 |
| Relation: | Proceedings of IEEE International Electron Devices Meeting |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780314506 9780780314504 |
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| تدمد: | 01631918 |
| DOI: | 10.1109/IEDM.1993.347228 |