A 0.6 /spl mu/m/sup 2/ 256 Mb trench DRAM cell with self-aligned BuriEd STrap (BEST)

التفاصيل البيبلوغرافية
العنوان: A 0.6 /spl mu/m/sup 2/ 256 Mb trench DRAM cell with self-aligned BuriEd STrap (BEST)
المؤلفون: Nesbit, L., Alsmeier, J., Chen, B., DeBrosse, J., Faheyk, P., Gall, M., Gambino, J., Gernhard, S., Ishiuchi, H., Kleinhenz, R., Mandelman, J., Mii, T., Morikado, M., Nitayama, A., Parke, S., Wong, H., Bronner, G.
المصدر: Proceedings of IEEE International Electron Devices Meeting Electron devices Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International. :627-630 1993
Relation: Proceedings of IEEE International Electron Devices Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780314506
9780780314504
تدمد:01631918
DOI:10.1109/IEDM.1993.347282