مؤتمر
Degradation-free Ta/sub 2/O/sub 5/ capacitor after BPSG reflow at 850/spl deg/C for high density DRAMs
| العنوان: | Degradation-free Ta/sub 2/O/sub 5/ capacitor after BPSG reflow at 850/spl deg/C for high density DRAMs |
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| المؤلفون: | Kwon, K.W., Park, S.O., Kang, C.S., Kim, Y.N., Ahn, S.T., Lee, M.Y. |
| المصدر: | Proceedings of IEEE International Electron Devices Meeting Electron devices Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International. :53-56 1993 |
| Relation: | Proceedings of IEEE International Electron Devices Meeting |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780314506 9780780314504 |
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| تدمد: | 01631918 |
| DOI: | 10.1109/IEDM.1993.347400 |