دورية أكاديمية
Piezoelectric properties of zinc oxide films on glass substrates deposited by RF-magnetron-mode electron cyclotron resonance sputtering system
| العنوان: | Piezoelectric properties of zinc oxide films on glass substrates deposited by RF-magnetron-mode electron cyclotron resonance sputtering system |
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| المؤلفون: | Kadota, M., Minakata, M. |
| المصدر: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 42(3):345-350 May, 1995 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08853010 15258955 |
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| DOI: | 10.1109/58.384442 |