مؤتمر
Effect of Chemical Mechanical Polish Process on Low-Temperature Poly-Sige Thin-Film Transistors
| العنوان: | Effect of Chemical Mechanical Polish Process on Low-Temperature Poly-Sige Thin-Film Transistors |
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| المؤلفون: | Ming-Shan Shieh, Chih-Yang Chen, Yuan-Jiun Hsu, Shen-De Wang, Tan-Fu Lei |
| المصدر: | 2006 IEEE International Reliability Physics Symposium Proceedings Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International. :711-712 Mar, 2006 |
| Relation: | 2006 IEEE International Reliability Physics Symposium Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780394984 9780780394988 0780394992 9780780394995 |
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| تدمد: | 15417026 19381891 |
| DOI: | 10.1109/RELPHY.2006.251337 |