مؤتمر
Wafer Level Thin Film Encapsulation for MEMS
العنوان: | Wafer Level Thin Film Encapsulation for MEMS |
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المؤلفون: | Gillot, C., Lagoutte, E., Charvet, P.L., Souchon, F., Sillon, N. |
المصدر: | 2005 Conference on High Density Microsystem Design and Packaging and Component Failure Analysis High Density Microsystem Design and Packaging and Component Failure Analysis, 2005 Conference on. :1-4 Jun, 2005 |
Relation: | 2005 Conference on High Density Microsystem Design and Packaging and Component Failure Analysis |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780392922 9780780392922 0780392930 9780780392939 |
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DOI: | 10.1109/HDP.2005.251432 |