مؤتمر
Wafer Level Thin Film Encapsulation for MEMS
| العنوان: | Wafer Level Thin Film Encapsulation for MEMS |
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| المؤلفون: | Gillot, C., Lagoutte, E., Charvet, P.L., Souchon, F., Sillon, N. |
| المصدر: | 2005 Conference on High Density Microsystem Design and Packaging and Component Failure Analysis High Density Microsystem Design and Packaging and Component Failure Analysis, 2005 Conference on. :1-4 Jun, 2005 |
| Relation: | 2005 Conference on High Density Microsystem Design and Packaging and Component Failure Analysis |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780392922 9780780392922 0780392930 9780780392939 |
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| DOI: | 10.1109/HDP.2005.251432 |