مؤتمر
Method of Fabricating Multiple-Frequency Film Bulk Acoustic Resonators in a Single Chip
العنوان: | Method of Fabricating Multiple-Frequency Film Bulk Acoustic Resonators in a Single Chip |
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المؤلفون: | Li-Peng Wang, Eyal Ginsburg, Dora Diamant, Qing Ma, Zhenyu Huang, Zhigang Suo |
المصدر: | 2006 IEEE International Frequency Control Symposium and Exposition International Frequency Control Symposium and Exposition, 2006 IEEE. :793-796 Jun, 2006 |
Relation: | 2006 IEEE International Frequency Control Symposium and Exposition |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 1424400740 9781424400744 |
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تدمد: | 23271914 |
DOI: | 10.1109/FREQ.2006.275489 |