Method of Fabricating Multiple-Frequency Film Bulk Acoustic Resonators in a Single Chip

التفاصيل البيبلوغرافية
العنوان: Method of Fabricating Multiple-Frequency Film Bulk Acoustic Resonators in a Single Chip
المؤلفون: Li-Peng Wang, Eyal Ginsburg, Dora Diamant, Qing Ma, Zhenyu Huang, Zhigang Suo
المصدر: 2006 IEEE International Frequency Control Symposium and Exposition International Frequency Control Symposium and Exposition, 2006 IEEE. :793-796 Jun, 2006
Relation: 2006 IEEE International Frequency Control Symposium and Exposition
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:1424400740
9781424400744
تدمد:23271914
DOI:10.1109/FREQ.2006.275489