مؤتمر
Study on the lapping slurry for ULSI silicon substrate preparation
| العنوان: | Study on the lapping slurry for ULSI silicon substrate preparation |
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| المؤلفون: | Jian-Wei Zhou, Xin-huan Niu, Qiao-shuo Shi, Yu-ling Liu |
| المصدر: | 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on. :487-488 Oct, 2006 |
| Relation: | 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 1424401615 9781424401611 1424401607 9781424401604 |
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| DOI: | 10.1109/ICSICT.2006.306309 |