مؤتمر
Capacitive pressure microsensor fabricated by bulk micromachining and sacrificial layer etching
| العنوان: | Capacitive pressure microsensor fabricated by bulk micromachining and sacrificial layer etching |
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| المؤلفون: | Luque, A., Bolea, R. G., Fernandez-Bolanos, M., Ionescu, A., Quero, J. M. |
| المصدر: | IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics IEEE Industrial Electronics, IECON 2006 - 32nd Annual Conference on. :2969-2974 Nov, 2006 |
| Relation: | IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781509091553 |
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| تدمد: | 1553572X |
| DOI: | 10.1109/IECON.2006.348052 |