مؤتمر
Thin SQI NEMS accelerometers compatible with In-IC integration
| العنوان: | Thin SQI NEMS accelerometers compatible with In-IC integration |
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| المؤلفون: | Ollier, Eric, Duraffourg, L., Delaye, M., Deneuville, S., Nguyen, V., Andreucci, P., Grange, H., Robert, P., Dianoux, R., Marchi, F., Baron, Thomas |
| المصدر: | 2006 5th IEEE Conference on Sensors Sensors, 2006. 5th IEEE Conference on. :54-57 Oct, 2006 |
| Relation: | 2006 5th IEEE Conference on Sensors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 1424403758 9781424403752 1424403766 9781424403769 |
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| تدمد: | 19300395 |
| DOI: | 10.1109/ICSENS.2007.355716 |