Quantitative analysis of Joule heating in surface micromachined Greek cross test structures

التفاصيل البيبلوغرافية
العنوان: Quantitative analysis of Joule heating in surface micromachined Greek cross test structures
المؤلفون: Enderling, S., Smith, S., Stevenson, J.T.M., Walton, A.J.
المصدر: 2007 IEEE International Conference on Microelectronic Test Structures Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on. :218-221 Mar, 2007
Relation: 2007 IEEE International Conference on Microelectronic Test Structures
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:142440780X
9781424407804
1424407818
9781424407811
تدمد:10719032
21581029
DOI:10.1109/ICMTS.2007.374487