Quantitative analysis of Joule heating in surface micromachined Greek cross test structures

التفاصيل البيبلوغرافية
العنوان: Quantitative analysis of Joule heating in surface micromachined Greek cross test structures
المؤلفون: Enderling, S., Smith, S., Stevenson, J.T.M., Walton, A.J.
المصدر: 2007 IEEE International Conference on Microelectronic Test Structures Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on. :218-221 Mar, 2007
Relation: 2007 IEEE International Conference on Microelectronic Test Structures
قاعدة البيانات: IEEE Xplore Digital Library