مؤتمر
Novel Thermally-Stable Hafnium and Zirconium ALD Precursors
| العنوان: | Novel Thermally-Stable Hafnium and Zirconium ALD Precursors |
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| المؤلفون: | Pinchart, Audrey, Blasco, Nicolas, Lachaud, Christophe, Schleisman, Anthony, Dussarrat, Christian, Suzuki, Ikuo, Yanagita, K. |
| المصدر: | 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI. :194-194 Jun, 2007 |
| Relation: | 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 1424406528 9781424406524 1424406536 9781424406531 |
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| تدمد: | 10788743 23766697 |
| DOI: | 10.1109/ASMC.2007.375090 |