مؤتمر
Novel Thermally-Stable Hafnium and Zirconium ALD Precursors
| العنوان: | Novel Thermally-Stable Hafnium and Zirconium ALD Precursors |
|---|---|
| المؤلفون: | Pinchart, Audrey, Blasco, Nicolas, Lachaud, Christophe, Schleisman, Anthony, Dussarrat, Christian, Suzuki, Ikuo, Yanagita, K. |
| المصدر: | 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI. :194-194 Jun, 2007 |
| Relation: | 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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