مؤتمر
Silicon nanophotonic wire structures fabricated by 193nm optical lithography
العنوان: | Silicon nanophotonic wire structures fabricated by 193nm optical lithography |
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المؤلفون: | Selvaraja, Shankar Kumar, Jaenen, Patrick, Beckx, Stephan, Bogaert, Wim, Dumon, Pieter, Van Thourout, Dries, Bates, Roel |
المصدر: | LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE. :48-49 Oct, 2007 |
Relation: | LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781424409242 9781424409259 |
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تدمد: | 10928081 |
DOI: | 10.1109/LEOS.2007.4382268 |