Silicon nanophotonic wire structures fabricated by 193nm optical lithography

التفاصيل البيبلوغرافية
العنوان: Silicon nanophotonic wire structures fabricated by 193nm optical lithography
المؤلفون: Selvaraja, Shankar Kumar, Jaenen, Patrick, Beckx, Stephan, Bogaert, Wim, Dumon, Pieter, Van Thourout, Dries, Bates, Roel
المصدر: LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE. :48-49 Oct, 2007
Relation: LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424409242
9781424409259
تدمد:10928081
DOI:10.1109/LEOS.2007.4382268