مؤتمر
Selective Rapid Thermal Oxidation of Silicon vs. Tungsten using Oxygen in Hydrogen
| العنوان: | Selective Rapid Thermal Oxidation of Silicon vs. Tungsten using Oxygen in Hydrogen |
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| المؤلفون: | Ripley, Martin, Balasubramanian, Ramachandran, Tam, Norman, Yokota, Yoshitaka, Lee, An Bae, Kim, Tae Jung, Lee, Chung Hun |
| المصدر: | 2007 15th International Conference on Advanced Thermal Processing of Semiconductors Advanced Thermal Processing of Semiconductors, 2007. RTP 2007. 15th International Conference on. :215-221 Oct, 2007 |
| Relation: | 2007 15th International Conference on Advanced Thermal Processing of Semiconductors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424412273 9781424412280 |
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| تدمد: | 19440251 1944026X |
| DOI: | 10.1109/RTP.2007.4383845 |