مؤتمر
New Approaches to Ultra Shallow Junction Formation by Molecular Implantation and Millisecond Laser Spike Annealing
| العنوان: | New Approaches to Ultra Shallow Junction Formation by Molecular Implantation and Millisecond Laser Spike Annealing |
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| المؤلفون: | Variam, Naushad, Kontos, Alex, Arevalo, Edwin, Hatem, Christopher, Chen, Shaoyin, Wang, Yun |
| المصدر: | 2007 15th International Conference on Advanced Thermal Processing of Semiconductors Advanced Thermal Processing of Semiconductors, 2007. RTP 2007. 15th International Conference on. :291-295 Oct, 2007 |
| Relation: | 2007 15th International Conference on Advanced Thermal Processing of Semiconductors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424412273 9781424412280 |
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| تدمد: | 19440251 1944026X |
| DOI: | 10.1109/RTP.2007.4383856 |