دورية أكاديمية

RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing

التفاصيل البيبلوغرافية
العنوان: RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing
المؤلفون: Tan, W. W., Li, R. F. Y., Loh, A. P., Ho, W. K.
المصدر: IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 57(2):406-412 Feb, 2008
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:00189456
15579662
DOI:10.1109/TIM.2007.910097