دورية أكاديمية
RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing
العنوان: | RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing |
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المؤلفون: | Tan, W. W., Li, R. F. Y., Loh, A. P., Ho, W. K. |
المصدر: | IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 57(2):406-412 Feb, 2008 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189456 15579662 |
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DOI: | 10.1109/TIM.2007.910097 |