High Frequencies Characterization of High-K Insulators and their Impact on Architectures of MIM Capacitors in Advanced Integrated Circuits

التفاصيل البيبلوغرافية
العنوان: High Frequencies Characterization of High-K Insulators and their Impact on Architectures of MIM Capacitors in Advanced Integrated Circuits
المؤلفون: Lacrevaz, T., Vo, T. T., Piquet, J., Bermond, C., Flechet, B., Defay, E., Thomas, M., Farcy, A., Cueto, O., Torres, J.
المصدر: 2006 Conference on Optoelectronic and Microelectronic Materials and Devices Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on. :41-44 Dec, 2006
Relation: 2006 Conference on Optoelectronic and Microelectronic Materials and Devices
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424405770
9781424405787
تدمد:10972137
23775505
DOI:10.1109/COMMAD.2006.4429874