مؤتمر
Demonstration of phase-controlled Ni-FUSI CMOSFETs employing SiON dielectrics capped with sub-monolayer ALD HfSiON for low power applications
| العنوان: | Demonstration of phase-controlled Ni-FUSI CMOSFETs employing SiON dielectrics capped with sub-monolayer ALD HfSiON for low power applications |
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| المؤلفون: | HongYu Yu, Shou-Zen Chang, Veloso, Anabela, Lauwers, Anne, Delabie, Annelies, Everaert, Jean-Luc, Singanamalla, Raghunath, Kerner, Christoph, Vrancken, Christa, Brus, Stephan, Absil, Philippe, Hoffmann, Thomas, Biesemans, Serge |
| المصدر: | ESSDERC 2007 - 37th European Solid State Device Research Conference Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European. :203-206 Sep, 2007 |
| Relation: | ESSDERC 2007 - 37th European Solid State Device Research Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424411238 9781424411245 |
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| تدمد: | 19308876 23786558 |
| DOI: | 10.1109/ESSDERC.2007.4430914 |