التفاصيل البيبلوغرافية
العنوان: |
Mechanical calibration of MEMS spring with 0.1-μn force resolution |
المؤلفون: |
Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya |
المصدر: |
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on. :227-230 Jan, 2007 |
Relation: |
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |