التفاصيل البيبلوغرافية
| العنوان: |
Mechanical calibration of MEMS spring with 0.1-μn force resolution |
| المؤلفون: |
Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya |
| المصدر: |
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on. :227-230 Jan, 2007 |
| Relation: |
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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