التفاصيل البيبلوغرافية
| العنوان: |
Thermal actuated multi-probes cantilever array for scanning probe parallel nano writing system |
| المؤلفون: |
Naoki Watanabe, Yoshitada Isono, Takamitsu Kakinaga, Toshihiko Nagamura, Tohru Sasaki |
| المصدر: |
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on. :99-102 Jan, 2007 |
| Relation: |
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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