مؤتمر
Spacer etch optimization on high density memory products to eliminate core leakage failures
| العنوان: | Spacer etch optimization on high density memory products to eliminate core leakage failures |
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| المؤلفون: | Easwar Dharmarajan, Shengnian Song, Mclaughlin, Lenore, Guan, John, Gazda, Jerzy, Lin, Emma, Wen-Jie Qi, Hidehiko Shiraiwa, Hussey, James, Lansford, Jeremy, Basab Banerjee |
| المصدر: | 2007 International Symposium on Semiconductor Manufacturing Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on. :1-4 Oct, 2007 |
| Relation: | 2007 International Symposium on Semiconductor Manufacturing |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424411412 9781424411429 |
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| تدمد: | 1523553X |
| DOI: | 10.1109/ISSM.2007.4446867 |