Morphology and growth behavior of P-type Si macropores in submicronmeter prepattern

التفاصيل البيبلوغرافية
العنوان: Morphology and growth behavior of P-type Si macropores in submicronmeter prepattern
المؤلفون: Lai, G. L., Leu, I. C., Hon, M. H.
المصدر: 2007 Digest of papers Microprocesses and Nanotechnology Microprocesses and Nanotechnology, 2007 Digest of papers. :392-393 Nov, 2007
Relation: 2007 Digest of Papers Microprocesses and Nanotechnology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784990247249
DOI:10.1109/IMNC.2007.4456269