مؤتمر
Integration of Millisecond Flash Anneal on CMOS Devices for DRAM Manufacturing
| العنوان: | Integration of Millisecond Flash Anneal on CMOS Devices for DRAM Manufacturing |
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| المؤلفون: | Lin, Shian-Jyh, Lai, Chao-Sung, Chen, Sheng-Tsung, Chen, Yi-Jung, Huang, Brady, Shih, Neng-Tai, Lee, Chung-Yuan, Lee, Pei-Ing |
| المصدر: | 2008 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) VLSI Technology, Systems and Applications, 2008. VLSI-TSA 2008. International Symposium on. :99-100 Apr, 2008 |
| Relation: | 2008 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424416141 9781424416158 |
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| تدمد: | 1524766X |
| DOI: | 10.1109/VTSA.2008.4530817 |