مؤتمر
Measurement of linewidth and line edge roughness for 1D nano CD linewidth standard product lines
| العنوان: | Measurement of linewidth and line edge roughness for 1D nano CD linewidth standard product lines |
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| المؤلفون: | Han, G.Q., Jiang, Z.D., Jing, W.X., Zhu, M.Z. |
| المصدر: | 2007 7th IEEE Conference on Nanotechnology (IEEE NANO) Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on. :769-772 Aug, 2007 |
| Relation: | 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424406074 9781424406081 |
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| تدمد: | 19449399 |
| DOI: | 10.1109/NANO.2007.4601299 |