Atomistic modeling of dopant diffusion and segregation in strained SiGeC

التفاصيل البيبلوغرافية
العنوان: Atomistic modeling of dopant diffusion and segregation in strained SiGeC
المؤلفون: Dunham, Scott T., Hsiu-Wu Guo, Jakyoung Song, Chihak Ahn
المصدر: 2008 International Conference on Simulation of Semiconductor Processes and Devices Simulation of Semiconductor Processes and Devices, 2008. SISPAD 2008. International Conference on. :333-336 Sep, 2008
Relation: 2008 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2008)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424417537
تدمد:19461569
19461577
DOI:10.1109/SISPAD.2008.4648305