مؤتمر
Performance impact of monolayer coating of polysilicon micromotors
| العنوان: | Performance impact of monolayer coating of polysilicon micromotors |
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| المؤلفون: | Deng, K., Collins, R.J., Mehregany, M., Sukenik, C.N. |
| المصدر: | Proceedings IEEE Micro Electro Mechanical Systems. 1995 Micro electro mechanical systems Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE. :368 1995 |
| Relation: | Proceedings IEEE Micro Electro Mechanical Systems. 1995 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780325036 9780780325036 |
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| DOI: | 10.1109/MEMSYS.1995.472568 |