On-chip hotplate for temperature control of CMOS SAW resonators

التفاصيل البيبلوغرافية
العنوان: On-chip hotplate for temperature control of CMOS SAW resonators
المؤلفون: Nordin, A. N., Voiculescu, I., Zaghloul, M.
المصدر: 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on. :71-76 Apr, 2008
Relation: 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9782355000065
DOI:10.1109/DTIP.2008.4752955