مؤتمر
Low Hydrogen Component SiN Films by PECVD for Low Propagation Loss Waveguide
| العنوان: | Low Hydrogen Component SiN Films by PECVD for Low Propagation Loss Waveguide |
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| المؤلفون: | Mao, S. C., Xu, Y.L., Sun, X.W., Tao, S.H., Yu, M.B., Lo, G.Q., Kwong, D.L. |
| المصدر: | 2008 IEEE PhotonicsGlobal@Singapore PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE. :1-4 Dec, 2008 |
| Relation: | 2008 IEEE PhotonicsGlobal@Singapore (IPGC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424429059 9781424439010 9781424429066 |
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| DOI: | 10.1109/IPGC.2008.4781373 |