دورية أكاديمية
Electromigration Failure Distributions of Cu/Low-$k$ Dual-Damascene Vias: Impact of the Critical Current Density and a New Reliability Extrapolation Methodology
العنوان: | Electromigration Failure Distributions of Cu/Low-$k$ Dual-Damascene Vias: Impact of the Critical Current Density and a New Reliability Extrapolation Methodology |
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المؤلفون: | Oates, A. S., Lin, M. H. |
المصدر: | IEEE Transactions on Device and Materials Reliability IEEE Trans. Device Mater. Relib. Device and Materials Reliability, IEEE Transactions on. 9(2):244-254 Jun, 2009 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 15304388 15582574 |
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DOI: | 10.1109/TDMR.2009.2015767 |