دورية أكاديمية

Electromigration Failure Distributions of Cu/Low-$k$ Dual-Damascene Vias: Impact of the Critical Current Density and a New Reliability Extrapolation Methodology

التفاصيل البيبلوغرافية
العنوان: Electromigration Failure Distributions of Cu/Low-$k$ Dual-Damascene Vias: Impact of the Critical Current Density and a New Reliability Extrapolation Methodology
المؤلفون: Oates, A. S., Lin, M. H.
المصدر: IEEE Transactions on Device and Materials Reliability IEEE Trans. Device Mater. Relib. Device and Materials Reliability, IEEE Transactions on. 9(2):244-254 Jun, 2009
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:15304388
15582574
DOI:10.1109/TDMR.2009.2015767