مؤتمر
Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors
| العنوان: | Study of Atomic Layer Deposited Zirconium Oxide Thin Films by Using Mono-Cyclopentadienyl Based Precursors |
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| المؤلفون: | Castan, H., Duenas, S., Garcia, H., Gomez, A., Bailon, L., Kukli, K., Niinisto, J., Ritala, M., Leskela, M. |
| المصدر: | 2009 Spanish Conference on Electron Devices Electron Devices, 2009. CDE 2009. Spanish Conference on. :8-11 Feb, 2009 |
| Relation: | 2009 Spanish Conference on Electron Devices (CDE) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424428380 9781424428397 |
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| تدمد: | 21634971 |
| DOI: | 10.1109/SCED.2009.4800416 |