مؤتمر
High Speed (GHz), Ultra-High Pressure (GPA) Sensor Array Fabricated in Integrated CMOS+MEMS Process
| العنوان: | High Speed (GHz), Ultra-High Pressure (GPA) Sensor Array Fabricated in Integrated CMOS+MEMS Process |
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| المؤلفون: | Okandan, Murat, Olsson, Roy, Baker, Michael, Resnick, Paul, Hill, Thomas A., Lackey, Chad, Pearson, Sean, Castaneda, Jaime, Trott, Wayne, Jones, David |
| المصدر: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on. :845-847 Jan, 2009 |
| Relation: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424429776 9781424429783 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2009.4805515 |