مؤتمر
CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration
| العنوان: | CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration |
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| المؤلفون: | Lapisa, Martin, Zimmer, Fabian, Niklaus, Frank, Gehner, Andreas, Stemme, Goran |
| المصدر: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on. :1007-1010 Jan, 2009 |
| Relation: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424429776 9781424429783 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2009.4805556 |